Blar i Bergen Open Research Archive på forfatter "Yallew, Henock Demessie"
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Long, stitch-free slot waveguide with s-bend tapered couplers for IR-sensing applications using electron beam lithography
Yallew, Henock Demessie; Jágerská, Jana; Greve, Martin Møller (Journal article, 2022)We use the fixed beam moving stage (FBMS) electron beam lithography technique to pattern a 10 mm long slot waveguide with s-bend tapered double-tip couplers. The fabrication method solves two major limitations of the FBMS ...