dc.contributor.author | Yallew, Henock Demessie | |
dc.contributor.author | Jágerská, Jana | |
dc.contributor.author | Greve, Martin Møller | |
dc.date.accessioned | 2023-02-08T14:45:29Z | |
dc.date.available | 2023-02-08T14:45:29Z | |
dc.date.created | 2023-01-03T11:09:27Z | |
dc.date.issued | 2022 | |
dc.identifier.issn | 1071-1023 | |
dc.identifier.uri | https://hdl.handle.net/11250/3049416 | |
dc.description.abstract | We use the fixed beam moving stage (FBMS) electron beam lithography technique to pattern a 10 mm long slot waveguide with s-bend tapered double-tip couplers. The fabrication method solves two major limitations of the FBMS mode, namely, the requirement for fixed-width structures and the incidence of stage placement drift for patterns involving elements of different widths. This has been achieved by fracturing the outline of the structure into fixed-width elements of gradually increasing width and creating intermediate overlap areas between the elements to mitigate the stage placement drifts. | en_US |
dc.language.iso | eng | en_US |
dc.publisher | American Institute of Physics | en_US |
dc.title | Long, stitch-free slot waveguide with s-bend tapered couplers for IR-sensing applications using electron beam lithography | en_US |
dc.type | Journal article | en_US |
dc.description.version | acceptedVersion | en_US |
dc.rights.holder | Copyright 2022 the authors | en_US |
dc.source.articlenumber | 012601 | en_US |
cristin.ispublished | true | |
cristin.fulltext | postprint | |
cristin.qualitycode | 0 | |
dc.identifier.doi | 10.1116/6.0002187 | |
dc.identifier.cristin | 2099480 | |
dc.source.journal | Journal of Vacuum Science & Technology B | en_US |
dc.identifier.citation | Journal of Vacuum Science & Technology B. 2023, 41 (1), 012601. | en_US |
dc.source.volume | 41 | en_US |
dc.source.issue | 1 | en_US |