Blar i Department of Physics and Technology på forfatter "Buhmann, Stefan"
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A novel approach to construct self-assembled 3D MEMS arrays
Akhundzada, Sapida; Yang, Xiaohui; Fiedler, Johannes; Käkel, Eireen; Al-Qargholi, Basim; Buhmann, Stefan; Ehresmann, Arno; Hillmer, Hartmut (Journal article; Peer reviewed, 2022)The paper presents the design and technological fabrication process of Yin or Yang-shaped, micron-sized electromechanical system (MEMS) elements displaying asymmetric hollow cylinders with two different curvatures of the ...