Blar i Bergen Open Research Archive på forfatter "Grepstad, Jon Olav"
-
Nanostructuring of free-standing, dielectric membranes using electron-beam lithography
Grepstad, Jon Olav; Greve, Martin Møller; Reisinger, Thomas; Holst, Bodil (Peer reviewed; Journal article, 2013)Nanostructured dielectric membranes are used in several applications ranging from de Broglie matter-wave optical elements to photonic crystals. Precise pattern transfer and high aspect ratio structures are crucial for many ...