Blar i Bergen Open Research Archive på forfatter "Nesse, Torstein"
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Nanometer-Resolution Mask Lithography with Matter Waves: Near-Field Binary Holography
Nesse, Torstein; Simonsen, Ingve; Holst, Bodil (Peer reviewed; Journal article, 2019)Mask-based pattern generation is a crucial step in microchip production. The next-generation extreme-ultraviolet- (EUV) lithography instruments with a wavelength of 13.5 nm are currently under development. In principle, ...