Browsing Registrations from Cristin by Journals "Machine Learning: Science and Technology"

Now showing items 1-1 of 1

    • Realistic mask generation for matter-wave lithography via machine learning 

      Fiedler, Johannes; Palau, Adria Salvador; Osestad, Eivind Kristen; Parviainen, Pekka; Holst, Bodil (Journal article; Peer reviewed, 2023)
      Fast production of large-area patterns is crucial for the established semiconductor industry and enables industrial-scale production of next-generation quantum devices. Metastable atom lithography with binary holography ...